3M™ Diamond Pad Conditioner Ring
- Brands3M
- Product Code: 3M™ Diamond Pad Conditioner Ring
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Availability: In Stock
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Abrasive Working Surface | Segmented |
Applications | CMP, Wafer Manufacturing |
CMP Process | Cu (Bulk), PMD/ILD, W (Bulk) |
Carrier Diameter (Metric) | 260 mm, 360 mm |
Carrier Form | Ring |
Carrier Material | 304 Stainless Steel |
Diamond Size | 181 micron, 250 micron, 251 micron |
Mineral Type | Nickel-based Alloy with Patterned Diamond |
Product Series | E187, E221, E3910, E3920, E3921 |
Product Type | Diamond Pad Conditioner |